Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction

Abstract

Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction is addressed. First, basic nonplanar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling nonplanar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 2 1/2D extraction tool.