Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements

Abstract

A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10% of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging.