Testing of micro-optics using digital holographic interferometric microscopy

Abstract

Digital holographic interferometric microscopy (DHIM) is used as metrological tool for the testing of micro-optics. The paper presents the measurement of sag height (h), radius of curvature (ROC), and shape of micro-lens. The advantage of using the DHIM is that the distortions due to aberrations in the optical system are avoided by the interferometric comparison of reconstructed phase with and without the object.