Optimization on the preparation of microfluidic channel using dry film resist

Firdaus Kamuri, Z. Abidin, Nurul Amziah Md Yunus, M. Hamidon, M. Yaacob, S. Kamarudin, Siti Zalikha Zhukhi
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引用次数: 1

Abstract

In this work, microfluidic channel was explored using dry film resist (DFR) method. Many of previous studies used SU-8 and PDMS as the medium to fabricate microfluidic channel for making a microfluidic chamber. Microscope slides were used as the substrate for the applications with bio components since it is inert and stable. The DFR serves to be the spacer to form the channel. Several processes which include cleaning, drying, prebaking, laminating, UV exposure and finally post-baking were involved in channel making. These processes need to be optimized in order to obtain a good chamber. Silicon rubber and UV glue were used to seal the chamber system to prevent any leakages.
利用干膜抗蚀剂制备微流控通道的优化研究
本文采用干膜抗蚀剂(DFR)方法对微流控通道进行了研究。以往的许多研究使用SU-8和PDMS作为介质制备微流控通道,用于制作微流控室。由于载玻片具有惰性和稳定性,因此用作生物组分应用的底物。DFR充当形成通道的间隔器。通道制作过程包括清洗、干燥、预焙、层压、紫外线曝光和最后的后焙。为了获得良好的腔室,需要对这些工艺进行优化。硅橡胶和UV胶用于密封腔室系统,以防止任何泄漏。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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