{"title":"Design ICCreatech semiconductor wafer accounting and probe measurement automatization software","authors":"D. Argunov, B. Shiryaev, A. Bezruk, A. Yushenko","doi":"10.1051/itmconf/20193004009","DOIUrl":null,"url":null,"abstract":"The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. Server and client solutions have been developed supported features of electronic covering documents, making automated on-wafer electrical characteristics measurement, and measurement data analysis.","PeriodicalId":433898,"journal":{"name":"ITM Web of Conferences","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ITM Web of Conferences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/itmconf/20193004009","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. Server and client solutions have been developed supported features of electronic covering documents, making automated on-wafer electrical characteristics measurement, and measurement data analysis.