The effects of impurities and temperature on amorphous silicon solar cells

Abstract

Amorphous silicon (a-Si) solar cells have been fabricated in SiH4glow discharges containing various impurity gases such as N2, H2O, CH4, etc. The effect of these impurity gases on the photovoltaic properties are discussed. Experimental data are also presented for the variation of photovoltaic properties with deposition temperature, annealing temperature in air, and temperature during operation.