Broadband mid-infrared integrated electro-optic modulator based on a Schottky diode embedded in a graded SiGe waveguide

Abstract

We present an integrated electro-optical modulator based on a Schottky diode embedded in a graded-index SiGe waveguide, operating in a wide mid-IR range from 6.4 to 10.7 µm wavelength. A 1.3 dB absorption variation is reported, which is already compatible with onchip synchronous detection experiments.