Electrical testing and simulation in the Microelectronic Engineering Department at RIT

P. Pearson, S. Hildreth, J.M. Smeenge, H. Kroezen
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引用次数: 2

Abstract

The education of a microelectronic process engineer involves a number of disciplines that must be woven together in the curriculum. The overall goal that a process engineer strives for is improvement of the product. Certain classes may focus on analyzing and improving individual processes such as plasma etching. The data collected for an individual process may not be easy to link to final product performance parameters. The final product's improvement is typically monitored by measurement of device or circuit electrical parameters. Electrical testing done in manufacturing classes then plays a key role in the education of a microelectronic engineer. The goal is to have the collected data tie together processing device physics, electronics and statistics course work. This paper describes the broad approach RIT has used to meet this goal.
RIT微电子工程系电气测试与仿真
微电子工艺工程师的教育涉及许多学科,这些学科必须在课程中交织在一起。工艺工程师追求的总体目标是改进产品。某些课程可能侧重于分析和改进个别工艺,如等离子蚀刻。为单个过程收集的数据可能不容易与最终产品性能参数联系起来。最终产品的改进通常是通过测量设备或电路电气参数来监测的。因此,在制造课程中进行的电气测试在微电子工程师的教育中起着关键作用。目标是将收集到的数据与处理设备物理、电子学和统计学课程联系起来。本文描述了RIT用于实现这一目标的广泛方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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