The residual vibration impact on the multiple target positioning time for array operation

Zhijun Yang, Youdun Bai, Xin Chen, Y. Guan, Wenxian Feng
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引用次数: 2

Abstract

Array processing, such as micro structure punching, wire bonding of LED array or integrated circuit, laser drilling, is widely used in electronic/optics manufacturing. In the processing, high speed positioning can cause strong excitation on the machine structure, which results in severe structure vibration and long settling time. Especially in multiple target positioning process, vibration exists in the whole procedure, so that the positioning means that the vibration amplitude is smaller than a given accuracy instead of completely still. According to vibration theory, new excitation will enhance or weaken the residual vibration with different phase, therefore, it is important to know what the impact of residual vibration on the continuous positioning. In this paper, the dynamic response of multiple target positioning is analyzed with flexible multibody dynamics. The optimal design of motion profile for a single positioning is performed and the positioning time is reduced by 10%. The impact of residual vibration is studied by choosing different start time, and the positioning time under corresponding residual vibration (amplitude and phase) is calculated. It is found that when the residual vibration is negative to the motion direction, the positing time is decreased, and vice versa. It is also found that the positioning time saving is much greater than the start time delay at the first few cycles. Up to 10% throughput can be improved by choosing a suitable start time for array processing. Analytic and experimental results match well. Our finding is important for improving the throughput of massive production of arrays processing in information technology.
残余振动对阵列多目标定位时间的影响
阵列加工,如微结构冲压、LED阵列或集成电路的线键合、激光钻孔等,广泛应用于电子/光学制造。在加工过程中,高速定位会对机器结构产生强烈的激励,导致结构振动剧烈,沉降时间长。特别是在多目标定位过程中,振动存在于整个定位过程中,因此定位意味着振动幅值小于给定精度,而不是完全静止。根据振动理论,新的激励会增强或减弱不同相位的残余振动,因此了解残余振动对连续定位的影响是很重要的。本文采用柔性多体动力学方法分析了多目标定位的动态响应。对单次定位的运动轮廓进行了优化设计,使定位时间缩短了10%。通过选择不同的启动时间,研究了残余振动的影响,并计算了相应残余振动下的定位时间(幅值和相位)。研究发现,当残余振动与运动方向为负时,定位时间缩短,反之亦然。在前几个周期,定位时间的节省远远大于启动时间的延迟。通过选择合适的阵列处理开始时间,可以提高高达10%的吞吐量。分析结果与实验结果吻合较好。我们的发现对于提高信息技术中阵列处理大规模生产的吞吐量具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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