AVSS 2011 demo session

Abstract

Summary form only given. In order to maintain the trend of ever-increasing performance, several directions have been pursued by the semiconductor industry in the past decade. i) Conventional Si and SiO 2 are being replaced by more exotic materials, from high-k gate dielectrics to metal gates and to high-mobility substrates, ii) new (3D) device architectures are being developed, iii) devices are downscaled toward atomic dimensions, while iv) supply voltages are not correspondingly reduced.