Modeling and characterization of BiCMOS embedded microfluidic platform for biosensing applications

Abstract

In this paper, modeling and characterization of BiCMOS embedded microfluidic platform for biosensing applications is presented. The novel process integration scheme with two bonded wafers provides microchannels, accessing to the inlets and the outlets as well as the mm-wave sensor easily. The developed microfluidic platform provides very flexible size of microchannels in BiCMOS chip and it is able to bring the fluid very close to the sensor. A fully integrated 120 GHz dielectric sensor has been used for the demonstration of the platform. The high reproducibility, micron size, high throughput and low-cost process make the presented BiCMOS integrated microfluidic channels as a key platform for bio and THz sensing applications.