A miniaturized non-dispersive infrared CO2 sensor based on a 2D integrating cylinder

Abstract

We propose a novel, miniaturized NDIR CO2 sensor based on a 2D integrating cylinder, realized using deep RIE and wafer bonding on silicon. The sensor has a detection limit down to ∼ 250ppm, with a small footprint of only ∼ 5mm × 5mm.