{"title":"Far-Field Nanostructuring in Dielectric Materials Beyond the Diffraction Limit Using Femtosecond Laser (「レーザーナノ加工技術の進展」特集号)","authors":"Y. Liao, Ya Cheng, K. Sugioka","doi":"10.2184/LSJ.43.11_752","DOIUrl":null,"url":null,"abstract":"progress in the development of far- fi eld nanostructuring technologies based on femtosecond laser direct writing. The principles for breaking through the diffraction limit in the interaction of a focused ultrafast laser beam with dielectric materials are presented, and applications of the femtosecond laser nanostructuring are discussed.","PeriodicalId":308244,"journal":{"name":"The Review of Laser Engineering","volume":"76 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Review of Laser Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2184/LSJ.43.11_752","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
progress in the development of far- fi eld nanostructuring technologies based on femtosecond laser direct writing. The principles for breaking through the diffraction limit in the interaction of a focused ultrafast laser beam with dielectric materials are presented, and applications of the femtosecond laser nanostructuring are discussed.