Side radiation of Rayleigh waves from synchronous leaky SAW resonators

T. Makkonen, M. Kalo, V. Plessky, J. Knuuttila, W. Steichen, A.A. Saloma
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引用次数: 5

Abstract

Scanning laser probing of leaky wave synchronous resonators used in "ladder" SAW filters fabricated on lithium tantalate often reveals the presence of distinct acoustic beams radiated outside the resonator from the transducer region. One of the beams is radiated in the direction perpendicular to the resonator, i.e., parallel to the transducer fingers, while two others are directed obliquely, and symmetrically with respect to the first beam, at an angle of about 60 degrees. We suppose that this radiation is generated by the charges accumulating at the tips of the electrodes. Since the velocity of the "leaky SAW" is visibly higher than that of a Rayleigh wave, the synchronism conditions can be met and the periodic system of sources (oscillating charges at the fingertips) generates the beams in the perpendicular direction, as well as the /spl plusmn/1st" diffraction orders resulting in the two obliquely propagating beams. The coupling strength and slowness of the Rayleigh SAW on 36/spl deg/ and 42/spl deg/ cut LiTaO/sub 3/ substrates vs. propagation direction is computed using 3D Green's function theory and the propagation angles for the Rayleigh wave beams as a function of frequency are predicted. The computed angles compare well with experiments.
同步漏声表面波谐振器瑞利波的侧辐射
扫描激光探测用于在钽酸锂上制造的“阶梯”SAW滤波器的漏波同步谐振器,经常发现存在从换能器区域辐射到谐振器外的独特声束。其中一束在垂直于谐振器的方向上辐射,即平行于换能器手指,而另外两束相对于第一束以约60度的角度斜向和对称地辐射。我们假定这种辐射是由电极尖端积聚的电荷产生的。由于“漏声SAW”的速度明显高于瑞利波的速度,因此可以满足同步条件,并且源的周期系统(指尖处的振荡电荷)产生垂直方向的光束,以及/spl + usmn/1”衍射阶,导致两束光束斜向传播。利用三维格林函数理论计算了瑞利声波在36/声压角/和42/声压角/切割LiTaO/sub /基片上随传播方向的耦合强度和慢度,并预测了瑞利波束的传播角随频率的变化规律。计算的角度与实验结果吻合较好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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