{"title":"Hydrophilicity Evaluation of Low Refractive Index SiO2 Optical Thin Films by Electron Beam and Sputtering Evaporation","authors":"Mutsuki Ito, H. Murotani, Takayuki Matsudaira","doi":"10.1364/oic.2022.fb.14","DOIUrl":null,"url":null,"abstract":"Excellent hydrophilic films can be produced by combination coating method of sputtering and electron beam deposition.","PeriodicalId":301400,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2022","volume":"87 13","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oic.2022.fb.14","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Excellent hydrophilic films can be produced by combination coating method of sputtering and electron beam deposition.