Dual-Angle Imaging System (DAISy) for Determining the Thickness of a Dielectric Thin Film

Yang Deng, Diana Magana, Zheng Tan, J. Kruschwitz
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Abstract

A team of undergraduate engineers in Optics were tasked to build a Dual-Angle Imaging System (DAISy) to measure the physical thickness of a dielectric film on silicon. This paper details their working prototype design.
测定介质薄膜厚度的双角度成像系统
一组光学专业的本科工程师负责建立一个双角度成像系统(DAISy)来测量硅上介电膜的物理厚度。本文详细介绍了它们的工作原型设计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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