Accuracy analysis of SLM based micro stereo vision system

Abstract

Based on the optical theory and digital image processing, the micro stereo imaging principle of Stereo Light Microscope (SLM) is studied and a SLM based micro stereo vision system is developed to improve three key problems including accuracy, speed and stability in Micro Electro Mechanical Systems (MEMS). In this paper, the system including micro stereo vision algorithms and hardware is introduced, and the accuracy is analyzed and compared with that of the representative systems according to the experimental data. Experimental results demonstrate that the proposed system is robust and effective in MEMS.