Mass sensitivity of aluminum nitride thin film based surface acoustic wave sensors prepared for biosensing application

Ying-ge Li, Lian-xiang Ma, P. Sarro, D. Du, Xue-feng Liu
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引用次数: 3

Abstract

Aluminum Nitride (AlN) based Surface Acoustic Wave (SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (AhO3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.
用于生物传感的氮化铝薄膜表面声波传感器的质量灵敏度研究
氮化铝(AlN)表面声波传感器在作为生物传感器方面显示出巨大的应用潜力。本文研究了基于Si/AlN结构的SAW传感器的质量灵敏度,该传感器是通过在SAW器件的输入端口和输出端口之间的有源区域沉积氧化铝(AhO3)薄膜制成的。idt的材料是铝。为了验证SiN薄膜在生物液体检测过程中的样品容纳和保护功能,还检测了SiN表面的接触角。我们发现SAW器件的质量灵敏度高达1958 MHz/g,并且SiN表面具有亲水性,接触角为45度。研究结果表明,基于AlN的SAW器件可以很好地应用于某些生物传感领域。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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