Research on the processing of vacuum microelectronic flat-panel displays

Abstract

The processing developed recently for vacuum microelectronic flat-panel nixies is described, including mainly how to fabricate the anode pillars (array) and the transparent flat-panel vacuum packages. Flat-panel nixies have been fabricated by the processing. The I-V characteristic between gates and cathodes was ideal. Field emission characteristic, accompanied by fluorescent light was also detected between cathodes and anodes. There are still some problems in maintaining the vacuum in package. The reasons are analyzed in the last part of the paper.