{"title":"Optimization of Backscattered Electron (BSE) Detector for Variable Pressure SEM with Monte Carlo method","authors":"Z. Hafsi, L. Djemoui, O. Mansour, A. Kadoun","doi":"10.2991/aisr.k.220201.017","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":127514,"journal":{"name":"Advances in Intelligent Systems Research","volume":"2 6","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in Intelligent Systems Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2991/aisr.k.220201.017","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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