The Design of Calibration Equipment Based on Digital Integrated Circuit Parameter Standards

Abstract

Based on the measurement principle of integrated circuit(IC) parameters, the IC parameter standards reproduce a batch of standard values with high accuracy and stability of IC parameters, which have a certain range of measurement and measurement uncertainty. The calibration equipment of IC parameters have the advantages of good versatility, portability, wide range of parameters, high accuracy and traceability. It is a good way to realize the calibration of ATE. This paper puts forward an architecture design solution of calibration equipment of IC parameters. This solution has certain innovation, can make sure the versatility and portability of calibration equipment, realize automatic calibration progress and the traceability of IC parameters.