A new downsized HVIC with high ESD tolerance

Abstract

To achieve a downsized high voltage integrated circuit (HVIC) with high electrostatic discharge (ESD) tolerance, we have proposed the improved self-shielding technique in which a high voltage junction termination (HVJT) diode works as a protection diode of high voltage Neh MOSFETs. This new technique is more effective not only in improving ESD tolerance but also in downsizing.