A base excitation device with PZT for MEMS dynamic testing under high temperature environment

D. She, Yiliu Yang
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Abstract

In order to excite silicon microcantilevers under the temperature ranging from room temperature to 500°C, an impact base excitation device was developed. In excitation device, an electric heating plate is used as the heating element to heat the testing microstructure. A separated structure was designed to protect the piezoelectric ceramic apart from the damage due to the high temperature. Using the developed excitation device, silicon microcantilevers were excited under 500°C. The impulse response signals of the silicon microcantilevers were obtained by a Laser Doppler Vibrometer. The dynamic characteristics of the silicon microcantilevers have been studied. The results show that the designed excitation device is effective to excite the silicon cantilevers under the high temperature environment.
一种用于高温环境下MEMS动态测试的PZT基极激励装置
为了在室温~ 500℃范围内对硅微悬臂梁进行激励,研制了一种冲击基激励装置。在激励装置中,电热板作为加热元件对被测微结构进行加热。设计了一种隔离结构,保护压电陶瓷不受高温的破坏。利用所研制的激励装置,在500℃下对硅微悬臂梁进行了激励。用激光多普勒测振仪获得了硅微悬臂梁的脉冲响应信号。研究了硅微悬臂梁的动态特性。结果表明,所设计的激励装置能有效地激励高温环境下的硅悬臂梁。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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