A Developed Mechanism for the Measurement of the Plasma Density Along a Surface Wave Excited Plasma Column

F. Sadeghikia, M. Dorbin, J. R. Rashed Mohassel, Hajar Binti Ja’afar
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Abstract

This paper is focused on the development of a new mechanism for the measurement of the plasma density along a surface wave excited plasma column. In the proposed method, based on the measurement of the phase differences between the probes of a phase difference detector microchip, the propagation constant and consequently the plasma density distribution along the column is estimated. For validation, an analytical technique is used to determine the plasma density along a plasma antenna. Good agreement between the analytical and measurement results validates the proposed measurement technique.
一种沿表面波激发等离子体柱测量等离子体密度的发展机制
本文研究了一种表面波激发等离子体柱等离子体密度测量的新机制。在该方法中,基于测量相位差检测器芯片探针之间的相位差,估计传播常数,从而估计等离子体沿柱的密度分布。为了验证,使用了一种分析技术来确定等离子体天线的等离子体密度。分析结果与测量结果吻合良好,验证了所提出的测量技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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