Design and simulation of a MEM pressure microgripper based on electrothermal microactuators

Optics + Photonics for Sustainable Energy Pub Date : 2016-09-23 DOI:10.1117/12.2237533

M. Tecpoyotl-T., Pedro Vargas Ch., S. Koshevaya, Ramón Cabello-R., Alejandra Ocampo-D., J. G. Vera-D.

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引用次数: 1

Abstract

Design and simulation of a novel pressure microgripper based on Microelectromechanical, MEM technology, and composed by several electrothermal microactuators were carried out in order to increment the displacement and the cutoff force. The implementation of an element of press or gripping in the arrow of chevron actuator was implemented to supply stability in the manipulation of micro-objects. Each device of the microgripper and its fundamental equations will be described. The fundamental parameters to understand the operation and behaviour of the device are analyzed through sweeps of temperature (from 30 °C up to 100 °C) and voltage (from 0.25 V up to 5 V), showing the feasibility to operate the microgripper with electrical or thermal feeding. The design and simulation were development with Finite Element Method (FEM) in Ansys-Workbench 16.0. In this work, the fundamental parameters were calculated in Ansys-Workbench. It is shown, that structural modifications have great impact in the displacement and the cut-off force of the microgripper.

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基于电热微执行器的MEM压力微夹持器设计与仿真

基于微机电、MEM技术，由多个电热微致动器组成一种新型压力微夹持器，以增加夹持器的位移和切断力。在矢形执行器的箭头中实现按压或夹持元件，以保证微物体操作的稳定性。将描述微夹持器的每个装置及其基本方程。通过扫描温度(从30°C到100°C)和电压(从0.25 V到5 V)，分析了了解设备操作和行为的基本参数，显示了通过电或热进给操作微夹持器的可行性。在Ansys-Workbench 16.0中采用有限元法进行设计和仿真。在Ansys-Workbench中对基本参数进行了计算。结果表明，结构的改变对微夹持器的位移和切断力有较大的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optics + Photonics for Sustainable Energy

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