Zirconium Oxide Dielectric Layer: Preparation and Characterization with Various Volumes of Acetylacetone

Abstract

The zirconium dioxide film was prepared by sol-gel method, and the electrical properties of the film were explored by adjusting the added amount of acetylacetone. When an appropriate amount of acetylacetone was added, the film became smooth and dense. However, when excess acetylacetone was added, the film started to become rough. Thus, as the amount of acetylacetone gradually increased, the curve of the accumulation area became steeper. It was found that the amount of acetylacetone affected shallow energy levels and induced capacitance. Adding 2.5 ml of acetylacetone allowed the best film quality and near-ideal capacitance curve of the zirconium dioxide film with good electrical characteristics. Oxide capacitance, k value, flat band voltage difference, trapped charge densities, effective oxide charge density, and interface state density were 152.6 pF, 27.5, 0.1 V, 1.35 × 1011 cm-2, 3.1 × 1011 cm-2, and 4.36 × 1011 eV-1 cm-2, respectively.