Electromagnetic-Thermal Analysis for Inductances and Eddy Current Losses of On-chip Spiral Inductors on Lossy Silicon Substrate

Abstract

Electromagnetic and thermal analysis for conventional and differential spiral inductors on lossy silicon substrate is rigorously carried out in this paper. Accurate analytical expressions for calculating the frequency- and temperature-dependent inductances and substrate losses due to eddy currents are presented. The simulation results agree well with the measured data. These closed-form expressions offer the great insights into lossy substrate effects as a function of both the frequency and temperature on the performance of on-chip spiral inductors