{"title":"A Study of Film Thickening of DLC Films by Hard and Soft Laminated Structure","authors":"Masashi Nakamura, Yasuhiro Shibata","doi":"10.1299/jsmeibaraki.2020.28.713","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":344736,"journal":{"name":"The Proceedings of Ibaraki District Conference","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Proceedings of Ibaraki District Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1299/jsmeibaraki.2020.28.713","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}