Fabrication and dynamic testing of electrostatic actuators with p/sup +/ silicon diaphragms

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings Pub Date : 1995-11-06 DOI:10.1109/TENCON.1995.496327

E. Yang, S.S. Yang, S. Han, S.Y. Kim

引用次数: 0

Abstract

This paper presents the fabrication and testing of electrostatic actuators. The p/sup +/ diaphragm is used as a moving electrode, whereas the aluminum layer deposited on a #7740 pyrex glass is used as a fixed electrode. The dynamic characteristics of the actuator with the corrugated diaphragm and that with the flat one are tested and compared with the calculation results, respectively.

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p/sup +/硅膜片静电致动器的制造与动态测试

本文介绍了静电致动器的制作和测试。p/sup +/隔膜用作移动电极，而沉积在#7740耐热玻璃上的铝层用作固定电极。分别对波纹膜片和平面膜片作动器的动态特性进行了测试，并与计算结果进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

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