A method to compensate packaging effects on three-axis MEMS accelerometer

Abstract

This paper discusses about the residual stress and packaging effect of three-axis micro-electro-mechanical system (MEMS) accelerometer. The 3D FEM model with modal analysis method is adopted for the resonance frequency estimation. This paper also presents a simple compensation model for trimming the offset of capacitance differentiation using the measured resonance frequency. This trimmming methodology can be realized by adjusting circuit gain in real product.