Miniature high-performance Quartz accelerometer for High-Dynamic, precision guided systems

Abstract

In 2015, InnaLabs reported on the development of a range of specialist, precision Quartz Pendulous Accelerometers. The performance requirement for these accelerometers was a key design driver for meeting the market needs within the tactical and the navigation grade market segments. In order to extend InnaLabs offering to cutting edge, volume applications with more stringent and highly dynamic environments such as High-Dynamic Precision Guided Systems, InnaLabs has recently released its new miniature low-cost precision Quartz Pendulous Accelerometer, the AI-Q-550. This paper shows the key features and budgets delivered by this 80g-MEMS-size accelerometer. It describes the design, construction and operating principles, with a special emphasis on the physical properties leading to extremely low warm-up, low bias vibration rectification (VRE), and bias and scale factor temperature stabilities of 100μg and 100ppm, respectively.