Y. Nishimura, S. Mori, T. Kawano, Y. Kunichika, K. Kasahara, T. Yaji, N. Ikeda, H. Oosato, Y. Sugimoto
{"title":"Electric field distribution perpendicular to the surface of mid-infrared antennas","authors":"Y. Nishimura, S. Mori, T. Kawano, Y. Kunichika, K. Kasahara, T. Yaji, N. Ikeda, H. Oosato, Y. Sugimoto","doi":"10.1109/METAMATERIALS.2014.6948630","DOIUrl":null,"url":null,"abstract":"The electric field in the normal direction was experimentally investigated by using mid-infrared antennas that were formed on a thin Al2O3 layer/Si substrate. The Al2O3 layer could be as thin as a single nm-order employing the atomic layer deposition, and was varied from 2 nm to 50 nm. The field distribution was estimated by observing the reflectivity change. It was found that the electric field decreased rapidly until a 6 nm depth from the antenna plane, and that the degree of attenuation became relaxed in the deeper region.","PeriodicalId":151955,"journal":{"name":"2014 8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics","volume":"91 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 8th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/METAMATERIALS.2014.6948630","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The electric field in the normal direction was experimentally investigated by using mid-infrared antennas that were formed on a thin Al2O3 layer/Si substrate. The Al2O3 layer could be as thin as a single nm-order employing the atomic layer deposition, and was varied from 2 nm to 50 nm. The field distribution was estimated by observing the reflectivity change. It was found that the electric field decreased rapidly until a 6 nm depth from the antenna plane, and that the degree of attenuation became relaxed in the deeper region.