Evidence of avalanche breakdown and microplasma noise in GaAs MESFETs

C. Tsironis, H. Beneking
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引用次数: 4

Abstract

Noise and prebreakdown properties of VPE GaAs MESFETs with and without VPE buffer layer have been investigated. The 1µm gate elements have been produced in the same common manner and with the same geometry starting from the same wafer. With buffer layer no prebreakdown effects are observed. Without buffer layer the instabilities of the DC characteristics, loops and current jumps, as well as the corresponding noise spikes and the noise spectrum can be related to microplasmas activated by avalanche breakdown in the space charge layer of the epi-substrate interface. This effect is located below the drain contact of the MESFETs and is associated by a substrate current flow, no gate current being present. The higher noise factor, also for frequencies higher than X-band, as well as anomalously low values of the breakdown voltage in power devices without buffer layer seems to be affected by that effect.
砷化镓mesfet中雪崩击穿和微等离子体噪声的证据
研究了有和没有VPE缓冲层的VPE GaAs mesfet的噪声和预击穿特性。1µm栅极元件以相同的通用方式和相同的几何形状从相同的晶圆开始生产。有缓冲层时,未观察到预击穿效应。在没有缓冲层的情况下,外延-衬底界面空间电荷层中雪崩击穿激活的微等离子体会导致直流特性、环路和电流跳变的不稳定性以及相应的噪声尖峰和噪声谱。这种效应位于mesfet的漏极触点下方,与基片电流流动有关,没有栅极电流存在。对于频率高于x波段的高噪声因子,以及没有缓冲层的功率器件中击穿电压的异常低值似乎受到该效应的影响。
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