New control schemes for stick-slip micro-positioning stages

S. Ibrir
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Abstract

Two control algorithms are developed for micro-positioning of stick-slip actuators. By modulation of a sawtooth signal according to the error between the instantaneous value of the stage displacement and the desired reference, a precise displacement motion of the stage is realized. The applied voltage is a saw-tooth signal whose support of time is a time-varying controlled variable. The support of time of the input is calculated as an integer number that is proportional to the tracking error signal. It has been found that the proportional and the integral-control-based procedures provide satisfactory transient and steady-state behaviors of the end effector. The tracking errors, recorded during the real-time experiments, are found very acceptable when we assess the complexity of the developed controllers and the overall distance traveled by the stage.
粘滑微定位平台的新控制方案
针对粘滑作动器的微定位问题,提出了两种控制算法。根据平台位移瞬时值与期望参考值之间的误差,对锯齿信号进行调制,实现平台的精确位移运动。施加电压是锯齿状信号,其时间支持是一个时变控制变量。输入的支持时间计算为一个与跟踪误差信号成正比的整数。研究发现,基于比例控制和积分控制的方法可以提供令人满意的末端执行器瞬态和稳态行为。在实时实验中记录的跟踪误差,当我们评估开发的控制器的复杂性和阶段行进的总距离时,发现是非常可接受的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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