Evaluation of Dielectric Measurements upon Thin Single Layer Solids using OpenCoaxial Probe Technology

Sina Hashemizadeh, Y. Kato, M. Horibe, N. Kuster
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Abstract

Measurements of the complex permittivity of materials as functions of frequency provide valuable information in different fields of engineering, industry, medicine and physical chemistry. Open-Ended Coaxial probes (OCP) are commonly used as nondestructive testing tools for dielectric analysis. The method, although nondestructive, does have limitations. For example, if there is an air gap between sample and probe, the discontinuity in the normal electric field causes a considerable error in the predicted permittivity. Even a small gap of the order 10μm in thickness can produce large errors in permittivity measurement by sensors (10% or more) because it lies in the region where the fringing fields are most intense [1]. For this reason, usually the probe use has been limited to liquid and semiliquid measurements, where good contact can be obtained.
利用开放同轴探针技术评价薄单层固体介质测量
测量材料的复介电常数作为频率的函数,在工程、工业、医学和物理化学的不同领域提供了有价值的信息。开放式同轴探头(OCP)是一种常用的介电分析无损检测工具。这种方法虽然是非破坏性的,但也有局限性。例如,如果样品和探针之间存在气隙,则法向电场的不连续会导致预测的介电常数产生相当大的误差。即使是厚度为10μm的小间隙,由于其位于边缘场最强烈的区域,传感器测量介电常数时也会产生较大的误差(10%或更多)[1]。由于这个原因,通常探头的使用仅限于液体和半液体的测量,在那里可以获得良好的接触。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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