Monolithic Ultra-Low-Loss Si3N4 / Si Photonic Platform for High Delay Density

Abstract

We demonstrate a photonic platform that monolithically combines traditional crystalline Si waveguides and ultra-low-loss Si3N4 waveguides (1.6dB/m) in a foundry-ready process. The material co-integration demonstrates high-density low loss delays and high-speed switch capabilities traditionally out of reach of Si3N4-only platforms, enabling high-performance analog photonics.