High-resolution Radiation Characterization for an Uniformly Emitted SiNx Nanophotonic Phased Array

Abstract

We experimentally demonstrate a high-resolution characterization setup for nanophotonic phased arrays. Waveguide modes are clearly observed in near-field radiation patterns of SiNx nano-antennas. This phased array has uniform emission throughout the antenna within 3dB bandwidth of 120 nm from 785 nm to 905 nm.