P. Vettiger, T. Albrecht, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, D. Jubin, W. Haberle, M. Lantz, H. Rothuizen, R. Stutz, D. Wiesmann, G. Binnig, P. Bachtold, G. Cherubini, C. Hagleitner, T. Loeliger, A. Pantazi, H. Pozidis, E. Eleftheriou
{"title":"Thousands of microcantilevers for highly parallel and ultra-dense data storage","authors":"P. Vettiger, T. Albrecht, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, D. Jubin, W. Haberle, M. Lantz, H. Rothuizen, R. Stutz, D. Wiesmann, G. Binnig, P. Bachtold, G. Cherubini, C. Hagleitner, T. Loeliger, A. Pantazi, H. Pozidis, E. Eleftheriou","doi":"10.1109/IEDM.2003.1269392","DOIUrl":null,"url":null,"abstract":"Ultrahigh storage densities of up to 1 Tb/in./sup 2/ or more can be achieved by using local-probe techniques to write, read back, and erase data in very thin polymer films. The thermomechanical scanning-probe-based data-storage concept, internally dubbed \"millipede\", combines ultrahigh density, small form factor, and high data rates. High data rates are achieved by parallel operation of large 2D arrays with thousands micro/nanomechanical cantilevers/tips that can be batch-fabricated by silicon surface-micromachining techniques. The inherent parallelism, the ultrahigh areal densities and the small form factor may open up new perspectives and opportunities for application in areas beyond those envisaged today.","PeriodicalId":344286,"journal":{"name":"IEEE International Electron Devices Meeting 2003","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Electron Devices Meeting 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2003.1269392","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
Ultrahigh storage densities of up to 1 Tb/in./sup 2/ or more can be achieved by using local-probe techniques to write, read back, and erase data in very thin polymer films. The thermomechanical scanning-probe-based data-storage concept, internally dubbed "millipede", combines ultrahigh density, small form factor, and high data rates. High data rates are achieved by parallel operation of large 2D arrays with thousands micro/nanomechanical cantilevers/tips that can be batch-fabricated by silicon surface-micromachining techniques. The inherent parallelism, the ultrahigh areal densities and the small form factor may open up new perspectives and opportunities for application in areas beyond those envisaged today.
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