Design, fabrication, and applications of ultra-narrow infrared bandpass interference filters

J. Kischkat, Sven Peters, M. Semtsiv, T. Wegner, M. Elagin, G. Monastyrskyi, Y. Flores, S. Kurlov, W. Masselink
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引用次数: 3

Abstract

We present progress on bandpass infrared interference filters with very narrow passbands to be used for sensitive trace gas and volatile compound imaging and detection and are suitable for mode selection and tuning in singlemode External Cavity Quantum Cascade Lasers. The process parameters for fabrication of such filters with central wavelengths in the 3-12 μm range are described. One representative fillter has a passband width of 6 nm or 0.14% with peak transmission of 62% and a central wavelength of 4.4μm. Theoretically, it can be tuned through about 4% by tilting with respect to the incident beam and offers orders of magnitude larger angular dispersion than diffraction gratings. We compare filters with single-cavity and coupled-cavity Fabry-Perot designs. The filters pass the tests for adhesion and abrasion as stated in MIL-C-48497.
超窄红外带通干扰滤光片的设计、制造与应用
本文介绍了窄带带通红外干涉滤光片的研究进展,该滤光片适用于单模外腔量子级联激光器的模式选择和调谐,可用于敏感的痕量气体和挥发性化合物的成像和检测。介绍了中心波长在3 ~ 12 μm范围内的滤光片的工艺参数。一种代表性的滤光片通带宽度为6nm或0.14%,峰值透射率为62%,中心波长为4.4μm。理论上,它可以通过相对于入射光束的倾斜来调谐约4%,并且提供比衍射光栅大几个数量级的角色散。我们比较了单腔和耦合腔法布里-珀罗设计的滤波器。过滤器通过MIL-C-48497中规定的粘附和磨损测试。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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