Progress in all-solid-state deep-ultraviolet lasers

Abstract

High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown /spl beta/-BaB/sub 2/O/sub 4/ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed.