Investigation of the Optical Properties of Silicon-on-Insulator Microring Resonators Using Optical Backscatter Reflectometry

I. A. Ryabcev, A. Ershov, D. V. Ryaikkenen, A. Burovikhin, R. V. Haponchyk, I. Tatsenko, A. Stashkevich, A. Nikitin, A. Ustinov
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Abstract

Introduction. Optical backscatter reflectometry is one of the most promising methods used to examine characteristic parameters relevant to the design of microring resonators. This method paves the way for experimental determination of the coupling coefficient and propagation loss. However, experimental verification of this technique by comparing the transmission characteristics obtained by reflectometry and those directly measured by an optical vector analyzer has not been carried out.Aim. To determine the parameters of microring resonators by optical reflectometry and to calculate on their basis the transmission characteristics of microring resonators. To compare the calculated transmission characteristics with those obtained experimentally using a high-resolution vector analyzer.Materials and methods. The characteristic parameters of silicon-on-insulator microring resonators were investigated using an ultra-high resolution reflectometer. An original algorithm was employed to derive the characteristic parameters of microring resonators from reflectograms. An optical vector analyzer was used to study the transmission characteristics of microring resonators. Numerical modeling of transmission characteristics considering the obtained parameters was carried out according an analytical approach based on partial wave analysis.Results. The obtained values of the power coupling coefficient κ = 0.167 and propagation losses α = 3.25 dB/cm were used for numerical simulation of the transmission characteristics of a microring resonator. These characteristics were found to agree well with those obtained experimentally. The free spectral range of 88.8 GHz and Q-factor of 45 000 were determined.Conclusion. An experimental study of the characteristic parameters of silicon-on-insulator microring resonators was conducted using an optical backscatter reflectometer. The performed comparison of the experimental and theoretical transmission characteristics showed good agreement, which indicates the high accuracy of the determined resonator parameters and, as a result, the relevance of the described method.
用光学后向散射反射法研究绝缘体上硅微环谐振器的光学特性
介绍。光学后向散射反射法是一种最有前途的方法,用于检测与微环谐振器设计相关的特征参数。该方法为实验确定耦合系数和传输损耗奠定了基础。然而,通过比较反射法获得的传输特性和光矢量分析仪直接测量的传输特性对该技术的实验验证尚未进行。用光学反射法确定微环谐振器的参数,并在此基础上计算微环谐振器的传输特性。将计算得到的传输特性与高分辨率矢量分析仪实验得到的传输特性进行比较。材料和方法。利用超高分辨率反射计研究了绝缘体上硅微环谐振器的特性参数。采用一种新颖的算法从反射图中推导出微环谐振器的特征参数。利用光矢量分析仪研究了微环谐振器的传输特性。根据基于部分波分析的解析方法,考虑得到的参数进行了传输特性的数值模拟。利用得到的功率耦合系数κ = 0.167和传播损耗α = 3.25 dB/cm,对微环谐振器的传输特性进行了数值模拟。这些特性与实验结果吻合得很好。测定了其自由光谱范围为88.8 GHz, q因子为45000。利用光学后向散射反射计对绝缘体上硅微环谐振器的特性参数进行了实验研究。实验和理论传输特性的比较结果吻合良好,表明所确定的谐振腔参数精度高,从而证明了所述方法的相关性。
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