Exploiting Nonlinearities for Frequency-Matched MEMS Gyroscopes Tuning

Abstract

This paper describes how mechanical nonlinearities can be exploited to obtain a frequency-matched MEMS gyroscope. Exploiting the hardening behavior of the oscillator, we show how it is possible to match drive and sense frequency by changing the drive displacement amplitude. This way, both the resonance amplitudes of the drive and sense axes are exploited, boosting the sensitivity of the device. Moreover, the near-flat drive frequency response increases both the robustness and bandwidth. A prototype of a yaw gyroscope was also manufactured to test the feasibility of the proposed approach.