R. Mozhaev, A. Pechenkin, Arseniy A. Baluev, O. B. Mavritskii, A. N. Egorov
{"title":"Review of laser scanning methods for microelectronic semiconductor structures investigation","authors":"R. Mozhaev, A. Pechenkin, Arseniy A. Baluev, O. B. Mavritskii, A. N. Egorov","doi":"10.26583/bit.2022.4.09","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":278246,"journal":{"name":"Bezopasnost informacionnyh tehnology","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bezopasnost informacionnyh tehnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.26583/bit.2022.4.09","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}