Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.TE.3

D. Tonova, S. Bruynooghe, D. Isfort

引用次数: 0

Abstract

The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.

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等离子离子辅助沉积多层涂层的粗糙度演化和光散射模拟

研究了低能等离子体离子辅助沉积Nb2O5和SiO2薄膜和多层膜的粗糙度演变过程。该模型用于预测长波通滤波器的光散射。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optical Interference Coatings Conference (OIC) 2019

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