Analysis of the Spread of Harmful Impurities in the Atmosphere from Microelectronic Facilities

Abstract

Atmospheric air is the most important component of the environment, which the quality depends on the weather and climatic conditions of the region and the specifics of harmful impurities of industrial facilities. The article presents the results of mathematical and computer modeling when constructing the fields of dispersion of harmful impurities in the atmosphere in the area of exploitation of a microelectronics facilities. The modeling of the spread of harmful impurities in the study area showed that the dispersion fields go beyond the boundaries of the protective and sanitary zone of an industrial facility and reach residential sectors.