Highly selective and sensitive gas sensors for exhaled breath analysis using CuBr thin film

S. Momose, Kazuaki Karasawa, M. Ushigome, R. Takasu, O. Tsuboi
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引用次数: 3

Abstract

We have examined a p-type semi-conductor CuBr thin film used for sensor devices that indicates the order of sensitivity to ammonia in parts per billion (ppb). The CuBr thin film also indicates excellent selectivity to ammonia among reductive gases, which additionally suggests its capacity for fast quantification of the order of seconds. Moreover, CuBr thin film can be adapted to a high-sensitivity aldehyde sensor by a surface modification. Since the fabrication process of CuBr thin film is compatible with an ordinal CMOS process, there is a potential for development into highly integrated and low power consumption sensor devices. These properties make CuBr thin film a promising candidate as a gas sensing material for human-breath analysis.
高选择性和敏感的气体传感器,用于呼气分析,使用cur薄膜
我们已经检查了用于传感器设备的p型半导体cur薄膜,该薄膜表明对氨的灵敏度以十亿分之一(ppb)为单位。在还原性气体中,cur薄膜对氨具有很好的选择性,这也表明它具有秒级的快速定量能力。此外,通过表面改性,cur薄膜可以适应高灵敏度的醛传感器。由于cur薄膜的制造工艺与有序CMOS工艺兼容,因此具有向高集成度和低功耗传感器器件发展的潜力。这些特性使cur薄膜成为一种很有前途的候选气体传感材料,用于人体呼吸分析。
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