Design and Development of 60 GHz Antenna Integrated with RF MEMS SPDT Switch for Transceiver Modules

Abstract

This paper presents a radio frequency microelectromechanical system (RF MEMS) based low loss and high transmit-to-receive isolation single-pole-double-throw (SPDT) switch integrated with antenna at 60 GHz for transceiver modules. The device is fabricated on $\boldsymbol{635\ \mu \mathrm{m}}$ alumina substrate using surface micromachining process. SPDT switch features a measured return loss of > 15 dB, insertion loss of < 2.47 dB and isolation of > 24.6 dB over the frequency band of 55–65 GHz. Total area of the SPDT switch is $\boldsymbol{2.443 \times 0.87\ \text{mm}^{2}}$. A conventional patch antenna designed at 60 GHz is incorporated at RF-output port of the SPDT switch. The integrated antenna shows a measured return loss of > 25 dB, and 10 dB impedance bandwidth of 8.5% at 60 GHz, when it is connected with either of the input ports of the SPDT switch. Also, a simulated gain of 5.433 dB is observed at 60 GHz. The total area of the integrated device is small enough (8.29 mm2) to fit in 60 GHz T/R modules. Fabricated device is also presented in the paper.