The key technology research of humidity generator based on divided flow method

Abstract

A high precision and portable standard equipment — humidity generator is developed by studying the key technology of divided flow method. In this system, how to control the ratio of moisture and dry gas is the key technology for humidity stability control. The system choose SHIMADEN program controller as the core control system. The program controller set the PID parameter of humidity control through the principle of mixing ratio of dry gas and moisture. The working range of this device is (20∼90) %RH, the humidity fluctuation is better than ± 0.5% RH at 20 1C. Technical indicators of this system also need to be optimized and upgraded; the control rate also needs to be further improved.