Three Dimensional Vector-based Analysis of Subwavelength Diffractive Optical Elements using the Finite-Difference-Time-Domain (FDTD) Method

M. Mirotznik, J. Mait, D. Prather, W. Beck
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Abstract

Diffractive optical elements (DOEs) whose features are smaller than the wavelength of illumination are referred to as subwavelength diffractive optical elements (SWDOEs). Subwavelength features provide SWDOEs with an added degree of flexibility over their superwavelength counterparts. For example, in the case of binary structures, SWDOEs have been shown to achieve diffraction efficiencies in excess of 90%[1]. This added flexibility, however, results in a significant cost. Namely, the analysis and subsequent design of SWDOEs require the use of rigorous electromagnetic (EM) models. These models, which incorporate the full vector nature of electromagnetic fields, can be theoretically challenging to construct and often demand considerable computational resources.
基于三维矢量的亚波长衍射光学元件时域有限差分(FDTD)分析
特征小于照明波长的衍射光学元件称为亚波长衍射光学元件。亚波长特性为swdo提供了比超波长特性更大的灵活性。例如,在二元结构的情况下,swdo已被证明可以实现超过90%的衍射效率[1]。然而,这种增加的灵活性带来了巨大的成本。也就是说,swdo的分析和后续设计需要使用严格的电磁(EM)模型。这些模型包含了电磁场的全部矢量性质,在理论上具有挑战性,并且通常需要大量的计算资源。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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