{"title":"AUTOMATED SYSTEM AND IMPROVEMENT OF POROUS SEMICONDUCTOR ANNEALING TECHNOLOGY","authors":"A. Bobryshev","doi":"10.30929/2072-2052.2022.2.58.32-39","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":122279,"journal":{"name":"Electromechanical and energy saving systems","volume":"325 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electromechanical and energy saving systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.30929/2072-2052.2022.2.58.32-39","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}